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C00335 - SEMI C3.35 - 塩化水素(HCl),品質99.997%の仕様 Revision:SEMI C3.35-1109E - Superseded SEMI 3D12 — Guide on

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Description

SEMI 3D12 — Guide on Measuring Flatness and Shape of Low Stiffness Substrates

1  The scope of this Standard is grades and tiers of hydrochloric acid used in the semiconductor industry

on the other hand

This Document applies only to nitrogen gas and argon gas delivered through pipelines

C00335 - SEMI C3.35 - 塩化水素(HCl),品質99.997%の仕様 Revision:SEMI C3.35-1109E - Superseded SEMI 3D12 — Guide onglobal Gases Committee200994global Audits and Reviews Subcommittee200910www. semi. org200911CD ROM1988200111 20105 7. 4. 4. 43 HCl Referenced SEMI Standards None.

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